Design, fabrication and characterization of pyroelectric thin film and its application for infrared gas sensors
Autor: | Qiu-lin, Tan, Wen-dong, Zhang, Chen-yang, Xue, Ji-jun, Xiong, Jun, Liu, Jun-hong, Li, Ting, Liang |
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Zdroj: | In Microelectronics Journal January 2009 40(1):58-62 |
Databáze: | ScienceDirect |
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