Design, fabrication and characterization of pyroelectric thin film and its application for infrared gas sensors

Autor: Qiu-lin, Tan, Wen-dong, Zhang, Chen-yang, Xue, Ji-jun, Xiong, Jun, Liu, Jun-hong, Li, Ting, Liang
Zdroj: In Microelectronics Journal January 2009 40(1):58-62
Databáze: ScienceDirect