Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon
| Autor: | Rao, R., Bradby, J.E., Ruffell, S., Williams, J.S. |
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| Zdroj: | In Microelectronics Journal June-July 2007 38(6-7):722-726 |
| Databáze: | ScienceDirect |
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