Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC–Co substrates

Autor: Kadlečíková, M., Vojs, M., Breza, J., Veselý, M., Frgala, Z., Michalka, M., Matějková, J., Vojačková, A., Daniš, T., Marton, M.
Zdroj: In Microelectronics Journal January 2007 38(1):20-23
Databáze: ScienceDirect