Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater
| Autor: | Kimura, Mitsuteru, Sakurai, Fumitoshi, Ohta, Hirao, Terada, Tomoyuki |
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| Zdroj: | In Microelectronics Journal February 2007 38(2):171-176 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect