Properties of transparent conductive ZnO:Al thin films prepared by magnetron sputtering
| Autor: | Fu, En-Gang ∗, Zhuang, Da-Ming, Zhang, Gong, ming, Zhao, Yang, Wei-Fang, Liu, Jia-Jun |
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| Zdroj: | In Microelectronics Journal April 2004 35(4):383-387 |
| Databáze: | ScienceDirect |
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