A new approach for eliminating unwanted patterns in attenuated phase shift masks
| Autor: | Mukherjee-Roy, M. ∗, Singh, N., Mehta, S.S., Samudra, G.S. |
|---|---|
| Zdroj: | In Microelectronics Journal October 2003 34(10):965-967 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mukherjee-Roy, M. ∗, Singh, N., Mehta, S.S., Samudra, G.S. |
|---|---|
| Zdroj: | In Microelectronics Journal October 2003 34(10):965-967 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect