Optical properties of PECVD dielectric thin films: thickness and deposition method dependence

Autor: Zhou, H a, Kim, H.K a, Shi, F.G a, ∗, Zhao, B b, Yota, J b
Zdroj: In Microelectronics Journal November 2002 33(11):999-1004
Databáze: ScienceDirect
Externí odkaz: