Latchup characterization of 0.18-micron STI cobalt silicided test structures
| Autor: | Goh, Wang-Ling *, Yeo, Kiat-Seng, Lazuardi, Stephen, Peng, Wei, Leong, Kam-Chew, Chan, Lap, See, Alex |
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| Zdroj: | In Microelectronics Journal September 2001 32(9):725-731 |
| Databáze: | ScienceDirect |
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