Permittivity of amorphous hydrogenated carbon (a-C:H) films as a function of thermal annealing
| Autor: | Balachova, O.V, Swart, J.W, Braga, E.S *, Cescato, L |
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| Zdroj: | In Microelectronics Journal August 2001 32(8):673-678 |
| Databáze: | ScienceDirect |
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