a-C:H Films deposited on crystalline silicon to masking it anisotropic etching by aqueous ethylenediamine solution
| Autor: | Fissore, A, Alves, M.A.R, da Silva Braga, E *, Cescato, L |
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| Zdroj: | In Microelectronics Journal January 2001 32(1):49-51 |
| Databáze: | ScienceDirect |
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