A Si MEMS microbearing with integrated safety sensors for surgical applications
| Autor: | Horváth, I., Panayotatos, P. *, Lu, Yicheng |
|---|---|
| Zdroj: | In Microelectronics Journal January 2001 32(1):1-9 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Horváth, I., Panayotatos, P. *, Lu, Yicheng |
|---|---|
| Zdroj: | In Microelectronics Journal January 2001 32(1):1-9 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect