Effects of rapid thermal annealing in vacuum on electrical properties of thin Ta2O5–Si structures
| Autor: | Spassov, D., Atanassova, E. *, Beshkov, G. |
|---|---|
| Zdroj: | In Microelectronics Journal August 2000 31(8):653-661 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Spassov, D., Atanassova, E. *, Beshkov, G. |
|---|---|
| Zdroj: | In Microelectronics Journal August 2000 31(8):653-661 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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