Large area and rapid electron beam annealing for high-quality epitaxial GaN layer
| Autor: | Lee, Wei-Hao, Jhong, Fong-Jyun, Yin, Yu-Tung, Chou, Chun-Yi, Shyue, Jing-Jong, Chen, Miin-Jang |
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| Zdroj: | In Materials Research Bulletin September 2022 153 |
| Databáze: | ScienceDirect |
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