Morphologies and optical properties of black silicon by room temperature reactive ion etching
| Autor: | Atteia, François *, Le Rouzo, Judikaël, Denaix, Lou, Duché, David, Berginc, Gérard, Simon, Jean Jacques, Escoubas, Ludovic |
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| Zdroj: | In Materials Research Bulletin November 2020 131 |
| Databáze: | ScienceDirect |
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