Effect of oxygen deficiency on electronic properties and local structure of amorphous tantalum oxide thin films
Autor: | Denny, Yus Rama, Firmansyah, Teguh, Oh, Suhk Kun, Kang, Hee Jae, Yang, Dong-Seok, Heo, Sung, Chung, JaeGwan, Lee, Jae Cheol |
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Zdroj: | In Materials Research Bulletin October 2016 82:1-6 |
Databáze: | ScienceDirect |
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