Structural variation of thin films deposited from Zn 3In 2O 6 target by RF-sputtering
| Autor: | Ushiro, T., Tsuji, D., Fukushima, A., Moriga, T., Nakabayashi, I., Murayama, K., Tominaga, K. |
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| Zdroj: | In Materials Research Bulletin 2001 36(5):1075-1082 |
| Databáze: | ScienceDirect |
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