The gas-liquid-Q-factor-inversion in MEMS plate resonators
| Autor: | Gesing, Andre, Tran, Thomas, Huber, Dominik, Steinmüller-Nethl, Doris, Pfusterschmied, Georg, Schneider, Michael, Platz, Daniel, Schmid, Ulrich |
|---|---|
| Zdroj: | In Journal of Sound and Vibration 1 September 2023 559 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect