Passivating antireflection coating of crystalline silicon using i/n a-Si:H/SiN trilayer

Autor:	Nunomura, Shota, Sakata, Isao, Sato, Aiko, Lozac'h, Mickaël, Misawa, Tatsuya, Itagaki, Naho, Shiratani, Masaharu
Zdroj:	In Journal of Physics and Chemistry of Solids September 2021 156
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect