Stability of anti-reflection coatings via the self-assembly encapsulation of silica nanoparticles by diazo-resins

Autor: Metzman, Jonathan S., Ridley, Jason I., Khalifa, Moataz B., Heflin, James R.
Zdroj: In Journal of Physics and Chemistry of Solids December 2015 87:271-277
Databáze: ScienceDirect