Formation mechanism of grown-in defects in silicon
| Autor: | Okino, T., Shimozaki, T., Lee, C.-G. |
|---|---|
| Zdroj: | In Journal of Physics and Chemistry of Solids 2008 69(2):307-310 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Okino, T., Shimozaki, T., Lee, C.-G. |
|---|---|
| Zdroj: | In Journal of Physics and Chemistry of Solids 2008 69(2):307-310 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect