Structural and physical analysis on MOCVD Ti–Si–N films
| Autor: | Varesi, E., Pavia, G., Zenkevich, A., Lebedinskii, Yu., Besana, P., Giussani, A., Modelli, A. |
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| Zdroj: | In Journal of Physics and Chemistry of Solids 2007 68(5):1046-1051 |
| Databáze: | ScienceDirect |
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