Organosilicon compounds as single-source precursors for SiCN films production
| Autor: | Ermakova, E., Kosinova, M. |
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| Zdroj: | In Journal of Organometallic Chemistry 15 January 2022 958 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ermakova, E., Kosinova, M. |
|---|---|
| Zdroj: | In Journal of Organometallic Chemistry 15 January 2022 958 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect