Deposition mechanisms and properties of oxygenated carbon nitride films from rf discharges of acetylene, nitrogen, oxygen and argon mixtures
| Autor: | Wang, Jianjun, Durrant, Steven F., de Moraes, Mário A.B. * |
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| Zdroj: | In Journal of Non-Crystalline Solids 2000 262(1):216-227 |
| Databáze: | ScienceDirect |
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