Electron paramagnetic resonance spectra of interface defects in nitric oxide treated Si/SiO 2

Autor: Bardeleben, H.J.von *, Cantin, J.L., Gosset, L.G., Ganem, J.J., Trimaille, I., Rigo, S.
Zdroj: In Journal of Non-Crystalline Solids 1999 245(1):169-174
Databáze: ScienceDirect