Influence of polycide deposition on the reliability of wet and nitrided oxides

Autor: Yckache, K a, *, Boivin, P a, Baiget, F a, Kristukat, C b, Auriel, G b, Sagnes, B b, Oualid, J b, Glachant, A c
Zdroj: In Journal of Non-Crystalline Solids 1999 245(1):97-103
Databáze: ScienceDirect
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