Infrared study of the structure of silicon oxynitride films produced by plasma enhanced chemical vapor deposition
| Autor: | Lisovskyy, I.P., Voitovych, M.V., Sarikov, A.V., Zlobin, S.O., Lukianov, A.N., Oberemok, O.S., Dubikovsky, O.V. |
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| Zdroj: | In Journal of Non-Crystalline Solids 1 October 2023 617 |
| Databáze: | ScienceDirect |
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