Evolution of physical and mechanical properties of fused silica after subsurface damage layer removal by RIE treatment
| Autor: | Ma, Youze, Zheng, Qiuju, Wang, Fang, Sun, Laixi, Yu, Jiaxin, He, Hongtu |
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| Zdroj: | In Journal of Non-Crystalline Solids 15 September 2023 616 |
| Databáze: | ScienceDirect |
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