Effects of the annealing of amorphous Ta2O5 coatings produced by ion beam sputtering concerning the effusion of argon and the chemical composition
| Autor: | Paolone, A., Placidi, E., Stellino, E., Betti, M.G., Majorana, E., Mariani, C., Nucara, A., Palumbo, O., Postorino, P., Rago, I., Trequattrini, F., Granata, M., Teillon, J., Hofman, D., Michel, C., Lemaitre, A., Shcheblanov, N., Cagnoli, G., Ricci, F. |
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| Zdroj: | In Journal of Non-Crystalline Solids 1 April 2021 557 |
| Databáze: | ScienceDirect |
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