Interface properties of amorphous-crystalline silicon heterojunctions prepared using DC saddle-field PECVD

Autor: Halliop, B., Salaun, M.F., Favre, W., Varache, R., Gueunier-Farret, M.E., Kleider, J.P., Kherani, N.P.
Zdroj: In Journal of Non-Crystalline Solids 1 September 2012 358(17):2227-2231
Databáze: ScienceDirect