Determination factor of direction growth in microcrystalline silicon thin film deposition
| Autor: | Saito, Kimihiko, Kondo, Michio |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 1 September 2012 358(17):1983-1986 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Saito, Kimihiko, Kondo, Michio |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 1 September 2012 358(17):1983-1986 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect