Effect of an inter-electrode distance in VHF-PECVD and gas flow ratios on a-SiGeC:H films and solar cells by using monomethyl germane as a germanium source
| Autor: | Kim, Do Yun, Yoshihara, Tomohiro, Porponth, Sichanugrist, Konagai, Makoto |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 1 September 2012 358(17):2272-2276 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect