High-rate HMDSO-based coatings in open air using atmospheric-pressure plasma jet
| Autor: | Kakiuchi, H., Higashida, K., Shibata, T., Ohmi, H., Yamada, T., Yasutake, K. |
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| Zdroj: | In Journal of Non-Crystalline Solids 1 September 2012 358(17):2462-2465 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect