Optical and structural properties of hydrogenated silicon films prepared by rf-magnetron sputtering at low growth temperatures: Study as function of argon gas dilution
| Autor: | Bouizem, Y., Kefif, K., Sib, J.D., Benlakehal, D., Kebab, A., Belfedal, A., Chahed, L. |
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| Zdroj: | In Journal of Non-Crystalline Solids 15 February 2012 358(4):854-859 |
| Databáze: | ScienceDirect |
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