Inline deposited thin-film silicon solar cells on imprinted foil using linear PECVD sources

Autor: Van Aken, Bas B., Löffler, Jochen, Heijna, Maurits C.R., Soppe, Wim J.
Zdroj: In Journal of Non-Crystalline Solids 1 September 2012 358(17):2268-2271
Databáze: ScienceDirect