Cross-contamination in single-chamber processes for thin-film silicon solar cells

Autor: Woerdenweber, J., Merdzhanova, T., Zimmermann, T., Flikweert, A.J., Stiebig, H., Beyer, W., Gordijn, A.
Zdroj: In Journal of Non-Crystalline Solids 1 September 2012 358(17):2183-2186
Databáze: ScienceDirect