Characterization of hydrogenated amorphous silicon thin films prepared by magnetron sputtering
| Autor: | Hossain, Maruf, Abu-Safe, Husam H., Naseem, Hameed, Brown, William D. |
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| Zdroj: | In Journal of Non-Crystalline Solids 2006 352(1):18-23 |
| Databáze: | ScienceDirect |
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