Properties of polycrystalline silicon films obtained by rapid thermal processing for micromechanical sensors
| Autor: | Girginoudi, D. *, Mitsinakis, A., Kotsani, M., Georgoulas, N., Thanailakis, A., Kontos, A.G., Stergiou, V.C., Raptis, Y.S. |
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| Zdroj: | In Journal of Non-Crystalline Solids 2004 343(1):54-60 |
| Databáze: | ScienceDirect |
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