Creation of metastable defects in microcrystalline silicon films by keV electron irradiation
| Autor: | Chukichev, M.V., Forsh, P.A., Fuhs, W., Kazanskii, A.G. |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 2004 338:378-381 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect