Zirconium silicate films obtained from novel MOCVD precursors
Autor: | Lemberger, M, Paskaleva, A, Zürcher, S, Bauer, A.J, Frey, L, Ryssel, H |
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Zdroj: | In Journal of Non-Crystalline Solids 2003 322(1):147-153 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Lemberger, M, Paskaleva, A, Zürcher, S, Bauer, A.J, Frey, L, Ryssel, H |
---|---|
Zdroj: | In Journal of Non-Crystalline Solids 2003 322(1):147-153 |
Databáze: | ScienceDirect |
Externí odkaz: |