Zirconium silicate films obtained from novel MOCVD precursors
| Autor: | Lemberger, M, Paskaleva, A, Zürcher, S, Bauer, A.J, Frey, L, Ryssel, H |
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| Zdroj: | In Journal of Non-Crystalline Solids 2003 322(1):147-153 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Lemberger, M, Paskaleva, A, Zürcher, S, Bauer, A.J, Frey, L, Ryssel, H |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 2003 322(1):147-153 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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