The effect of substrate temperature on HW-CVD deposited a-SiGe:H films
| Autor: | Jadkar, S.R., Sali, Jaydeep V., Kshirsagar, S.T., Takwale, M.G. |
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| Zdroj: | In Journal of Non-Crystalline Solids 2002 299 Part 1:168-173 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Jadkar, S.R., Sali, Jaydeep V., Kshirsagar, S.T., Takwale, M.G. |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 2002 299 Part 1:168-173 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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