Phase-pure a-SiC:H films prepared by closed chamber CVD
| Autor: | Koynov, Svetoslav, Tzolov, Marian, Schwarz, Reinhard |
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| Zdroj: | In Journal of Non-Crystalline Solids 2002 299 Part 2:896-901 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Koynov, Svetoslav, Tzolov, Marian, Schwarz, Reinhard |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 2002 299 Part 2:896-901 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect