Improvements on the local order of amorphous hydrogenated silicon carbide films

Autor: Prado, R.J., Fantini, M.C.A. *, Tabacniks, M.H., Villacorta Cardoso, C.A., Pereyra, I., Flank, A.M.
Zdroj: In Journal of Non-Crystalline Solids 2001 283(1):1-10
Databáze: ScienceDirect