Preparation of amorphous fluoride films by electron cyclotron resonance plasma-enhanced chemical vapor deposition
| Autor: | Shojiya, Masanori *, Takahashi, Shuhei, Teramoto, Miyuki, Konishi, Akio, Kawamoto, Yoji |
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| Zdroj: | In Journal of Non-Crystalline Solids 2001 284(1):153-159 |
| Databáze: | ScienceDirect |
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