Mechanism of polishing of SiO 2 films by CeO 2 particles
| Autor: | Hoshino, Tetsuya *, Kurata, Yasushi, Terasaki, Yuuki, Susa, Kenzo |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 2001 283(1):129-136 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hoshino, Tetsuya *, Kurata, Yasushi, Terasaki, Yuuki, Susa, Kenzo |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids 2001 283(1):129-136 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect