Surface amorphization in diamond turning of silicon crystal investigated by transmission electron microscopy

Autor: Jasinevicius, Renato G *, dos Santos, Francisco J, Pizani, Paulo S, Duduch, Jaime G, Porto, Arthur J.V
Zdroj: In Journal of Non-Crystalline Solids 2000 272(2):174-178
Databáze: ScienceDirect