Effect of growth temperature on properties of β-Ga2O3 films grown on AlN by low-pressure chemical vapor deposition
| Autor: | Hu, Jichao, Zhang, Kewei, Yang, Xiaodong, Xu, Bei, Li, Yao, Zhang, Chao, Wang, Xi, Wang, Xinmei, He, Xiaomin |
|---|---|
| Zdroj: | In Journal of Luminescence October 2024 274 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect