Investigation of sidewall damage induced by reactive ion etching on AlGaInP MESA for micro-LED application
| Autor: | Boussadi, Younes, Rochat, Névine, Barnes, Jean-Paul, Bakir, Badhise Ben, Ferrandis, Philippe, Masenelli, Bruno, Licitra, Christophe |
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| Zdroj: | In Journal of Luminescence June 2021 234 |
| Databáze: | ScienceDirect |
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