High resolution surface analysis of Si roughening in dilute ammonium fluoride solution

Autor: Lewerenz, H.J *, Aggour, M, Murrell, C, Jakubowicz, J, Kanis, M, Campbell, S.A, Cox, P.A, Hoffmann, P, Jungblut, H, Schmeißer, D
Zdroj: In Journal of Electroanalytical Chemistry 2003 540:3-6
Databáze: ScienceDirect