In situ optical monitoring for SiGe epitaxy
| Autor: | Robbins, D.J *, Pickering, C, Russell, J, Carline, R.T, Dann, A.W, Marrs, A.D, Glasper, J.L |
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| Zdroj: | In Journal of Crystal Growth 2000 209(2):290-296 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Robbins, D.J *, Pickering, C, Russell, J, Carline, R.T, Dann, A.W, Marrs, A.D, Glasper, J.L |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2000 209(2):290-296 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect