Analysis of gallium arsenide deposition in a horizontal chemical vapor deposition reactor using massively parallel computations
| Autor: | Salinger, Andrew G. *, Shadid, John N., A. Hutchinson, Scott, Hennigan, Gary L., Devine, Karen D., Moffat, Harry K. |
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| Zdroj: | In Journal of Crystal Growth 1999 203(4):516-533 |
| Databáze: | ScienceDirect |
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